Measuring volume resistivity and surface resistivity of conductive materials using the four-point probe method
Four point probes are used in nanofabrication to measure the resistive properties of conducting films which may include substrates, deposited films, and doped regions on a sample surface. The four-point probe method can be used to measure volume resistivity, surface resistivity, and conductivity. The four-point probe method is the four-terminal measurement using four-point array probes …
